Step-and-Repeat Nanoimprint-, Photo- and Laser Lithography from One Customised CNC Machine
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چکیده
منابع مشابه
Step-and-Repeat Nanoimprint-, Photo- and Laser Lithography from One Customised CNC Machine
The conversion of a computer numerical control machine into a nanoimprint step-and-repeat tool with additional laser- and photolithography capacity is documented here. All three processes, each demonstrated on a variety of photoresists, are performed successfully and analysed so as to enable the reader to relate their known lithography process(es) to the findings. Using the converted tool, 1 cm...
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Nowadays, nanodevices like small fluidic channels, semiconductor lasers, nano contacts for solar cells, nano magnets or nano antennas for infrared detection (THz) are of great interest. The applications for these devices extend the fields of e.g. energy, computational or medical sciences. For example, by arranging nano dots consisting of a magnetic material, logical circuits can be designed whi...
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The Nanoimprint lithography (NIL) is a novel method of fabricating micro/nanometer scale patterns with low cost, high throughput and high resolution (Chou et al., 1996). Unlike traditionally optical lithographic approaches, which create pattern through the use of photons or electrons to modify the chemical and physical properties of the resist, NIL relies on direct mechanical deformation of the...
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We have demonstrated multi-step room-temperature nanoimprint lithography (RTNIL) using polystyrene (PS, average molecular weight 97 kg/mol) as the polymer layer for imprinting complex patterns. Our motivation in pursuing multi-step RTNIL is to create a new pattern-generation method, able to create complex and arbitrary patterns without requiring a custom template for each new pattern. A variety...
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ژورنال
عنوان ژورنال: Nanoscale Research Letters
سال: 2016
ISSN: 1931-7573,1556-276X
DOI: 10.1186/s11671-016-1341-9