Step-and-Repeat Nanoimprint-, Photo- and Laser Lithography from One Customised CNC Machine

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Step-and-Repeat Nanoimprint-, Photo- and Laser Lithography from One Customised CNC Machine

The conversion of a computer numerical control machine into a nanoimprint step-and-repeat tool with additional laser- and photolithography capacity is documented here. All three processes, each demonstrated on a variety of photoresists, are performed successfully and analysed so as to enable the reader to relate their known lithography process(es) to the findings. Using the converted tool, 1 cm...

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ژورنال

عنوان ژورنال: Nanoscale Research Letters

سال: 2016

ISSN: 1931-7573,1556-276X

DOI: 10.1186/s11671-016-1341-9